Software

Analysis of modulated time-domain thermoreflectance v2.6.2, posted October 8, 2008
MATLAB scripts for analysis of TDTR data posted September 12, 2012
MATLAB scripts for analysis of TDTR data G. Hohensee, posted September 25, 2014
MATLAB scripts for analysis of TDTR data G. Hohensee, version H3, February 27, 2015
MATLAB scripts for analysis of TDTR data, J. Kimling, January 9, 2017; corrected 1D approximation in earlier versions of bidirectional models; includes temperature measurement at locations other than the heat source and depth dependence of optical absorption; v2 corrects errors in the v1 code from November 2016.

LabVIEW automation for time-domain thermoreflectance, posted Jan. 2, 2008
LabVIEW automation for TDTR, posted April 18, 2012

Analysis of 3ω data for arbitrary multilayer geometry, posted Jan. 5, 2009

MATLAB scripts for modeling velocities of surface acoustic waves, Dongyao Li, December 2016

Thermal conductivity data

The files are two columns of ASCII data; the two columns are the temperature in degrees Kelvin and the thermal conductivity in W cm⁻¹ K⁻¹.

• Bulk materials
  • amorphous SiO₂
  • Corning glass ceramic #9606
  • Corning Pyrex #7740
  • single crystal yttria-stabilized zirconia, Zr_1−xY_xO_2−x/2; x=0.08
  • single crystal yttria-stabilized zirconia, Zr_1−xY_xO_2−x/2; x=0.15
  • sapphire
  • single crystal MgO
  • amorphous As₂S₃
  • polycrystalline Si_0.80Ge_0.20 alloy
  • amorphous Se
  • PMMA
• Homogeneous thin films
  • epitaxial Si_0.85Ge_0.15 alloy, 1.1 microns thick
  • amorphous diamond, filtered-arc deposition, 475 nm thick
  • diamond-like amorphous carbon, plasma-assisted CVD, 313 nm thick
  • soft amorphous carbon, remote-plasma CVD, 325 nm thick
  • SiN_x, atmospheric pressure CVD, 180 nm thick
  • SiN_x, plasma CVD, 500 nm thick
  • SiC, plasma CVD, 250 nm thick
  • Dow Corning FOx, 285 nm thick
  • Dow Corning XLK, 500 nm thick
  • amorphous Al₂O₃, ion-beam sputtered, 0.95 μm thick
  • κ−Al₂O₃, CVD, 13 μm thick
  • α−Al₂O₃, CVD, 13 μm thick
• Multilayer thin films
  • Si-Ge superlattice, bilayer thickness = 3.0 nm
  • Si-Ge superlattice, bilayer thickness = 5.0 nm

Useful data for analyzing TDTR experiments

• Temperature dependence of volumetric heat capacity
  • Al
  • Al at lower T
  • Si
  • Si at higher T
  • MgO
  • amorphous SiO₂
  • TiN at low T
  • TiN at high T
  • Al₂O₃
  • SrTiO₃
  • NdGaO₃
• Temperature dependence of thermal conductivity
  • Si
  • SrTiO₃
  • NdGaO₃
• rms laser spot sizes measured by spatial correlation of pump and probe. The spatial correlation of the pump and probe increases by 10% from the beginning to end of the delay line for TDTR-II.

  For TDTR-I (May 22, 2015)

  • 5x objective, 10.6 μm
  • 10X objective, 5.3 μm
  • 20X objective, 2.7 μm

  For TDTR-II (March 20, 2015)

  • 5x objective, 10.7 μm (9.7 μm after September 24, 2022)
  • 10X objective, 5.5 μm (4.9 μm after September 24, 2022)
  • 20X objective, 2.7 μm
  • 50X objective, 1.1 μm
• Optical power calibration is 1.08 times the reading of the model 835 power meter.
• Transmission coefficients of the objectives at 785 nm are 0.87, 0.90, 0.80, 0.70 for 2×, 5×, 10×, and 20×, respectively.
• Steady-state heating for absorbed laser power of 1 mW:
  • substrate thermal conductivity of 1 W/m-K, without considering heat spreading by Al layer, steady-state heating is 11, 27, 60, 110 K, respectively, .
  • with heat spreading by 100 nm thick Al layer of thermal conductivity of 200 W/m-K, steady-state heating is 6.5, 11, 15, and 20 K, respectively.
  • substrate thermal conductivity of 0.2 W/m-K in combination with heat spreading by the Al layer, steady-state heating is  15, 22, 27, and 32 K.
• Per pulse heating for absorbed laser power of 1 mW at short delay time:
  • with heat capacity of 3 J/cm3-K and optical absorption depth of 15 nm, per pulse heating is 0.25, 1.5, 6, and 24 K, respectively.
  • with heat capacity of 2.4 J/cm3-K and heat distributed equally through a film thickness of 80 nm, per pulse heating is 0.06, 0.36, 1.4, 5.7 K, respectively.

Filter sets for two-tint approach

•  TDTR-II is running with approximately twice the bandwidth (25 nm) of TDTR-I (12 nm).
• From 2014 to April 2019, the filters sets for TDTR-I and TDTR-II were the same.  Semrock filters: long-pass  LP02-785RE-25 in the pump path; short-pass SP01-785RU-25 in the probe path and in front of the detector. With this filter configuration, the FWHM of the temporal correlation of the pump and probe as measured by a GaP detector for both systems was approximately 1.2 ps.
• After May 2019, the filters for TDTR-I are: SP01-785RU-25 in the pump path; LP02-785RU-25 (titled by about 8 degrees to blue shift by 3 nm) in the probe path; and LP02-785RE-25 in front of the detector.  The filters for TDTR-II are: SP01-785RU-25 in the pump path;  FF01-776/LP-25 in the probe path; and LP02-785RE-25 (tilted by about 8 degrees to blue shift by 3 nm) in front of the detector.  With these filter configurations,  the FWHM of the temporal correlation of the pump and probe for TDTR-I is approximately 0.7 ps; for TDTR-II, 0.8 ps.